A Sensing Circuit For Micro-Capacitance Tomography

A circuit is described that has applications for micro scale capacitance tomography. The circuit has been developed for use with linear arrays of rectangular electrodes measuring between 10μm-100μm and integrated onto a silicon chip. Simulations suggest that the circuit is capable of measuring very small capacitance changes of the order of tens of atto-farads. The circuit also features a small area footprint, which allows the implementation of large arrays of electrodes, and the associated measurement circuitry, onto one integrated circuit.